XSCAN-9860 Series
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- 2D/3D Hybrid Inspection System with Automation Technology
- Precise results using high-speed OCT technology
- Built for user convenience
S/W, Table Size, etc. can be customized according to users and applications.
Specification
XSCAN-9860
X-RAY Tube
160 kV
Tube type / Focal spot
Open Type 1μm
X-RAY Detector
Image Intensifier of Flat Panel Detector
Inspection Area / Table size
245 x 77mm / 310 x 210mm
Axis control
Basic 8 Axis : X1, Y1, X2, Y2, Z, T1, T2, R
Dimension
3120 x 2450 x 2200mm (Including Loader)
Weight
6000kg
Utility
AC 220V, Single phase, 50/60Hz
Application
Flip Chip/AP, CPU, GPU, ASIC, LSI Memory, etc
Application field
- Flip chip, Memory, LSI bump, Wafer bump, etc
Features
- In-line Bump Detection by Automatic Inspection Algorithm
- High-Speed Oblique Computed Tomography Technology
- Open micro focus tube with transmission target
- Tube Voltage Range : 10 ∼ 160kV
- Current Range : 50 ∼ 1000μA
- Max.Tube power : 80W
- Max.Target power : 10W
- Min.Detectability : 0.25μm
- 160kV High-Tension Generator
- 60° Oblique Angle & 360° Rotation
Evolving the Science of Precision
V Eye Precision Limited.
19/51 Moo 3, Phaholyothin Road. Klong-nueng, Klongluang, Pathumthani 12120 Thailand
Tel : 02-902-0593-4