A-100 Real time X-Ray for Semiconductor
A-100 X-Ray Basic Specification
Focal Spot Size 5?
Voltage/Current 100kV / 250uA
Magnification x214 / x429
X-Ray Detector FPD (Flat Panel Detector)
Detector Tilt Angle Tilt 50?
Manipulator Basic] 4-Axis (X, Y, Z, Detector Tilt) / Option] Cone Beam CT Rotation
Table size (=Inspection Area) 500 x 500 mm
Max. Sample Loading 5kg
X-Ray Leakage Dose ?1uSv/hour
Dimension (WxDxH mm) 1360 x 1440 x 1700
Equipment Weight(kg) 1400kg
Power Supply 220 VAC Single phase 50/60Hz
Remarks Option] Cone Beam CT&3D / Rotation Table